求翻译: Impact of film properties of atomic layer deposited HfO2 resulting from annealing with a TiN capping layer 是什么意思?
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参考翻译1: 原子层影片物产的冲击放置了HfO<sub>2</sub>起因于与罐子加盖的层数的焖火 参考翻译3: 原子层膜性能的影响沉积造成的与盖层锡退火的 HfO&lt;sub&gt;2&lt;/sub&gt; 参考翻译5: 影响膜性能的原子层沉积的氧化铪<副> 2 < /子>造成退火与锡盖层
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