求翻译: Plasma‐enhanced chemical vapor deposition of in situ doped epitaxial silicon at low temperatures. I. Arsenic doping 是什么意思?
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参考翻译1: Plasma ‐ enhanced chemical vapor deposition in situ doped epitaxial silicon at low temperatures. I. Arsenic doping 参考翻译3: No input file specified.
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Plasma‐enhanced chemical vapor deposition of in situ doped epitaxial silicon at low temperatures. I. Arsenic doping的翻译是:Plasma ‐ enhanced chemical vapor deposition in situ doped epitaxial silicon at low temperatures. I. Arsenic doping[翻译]
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