求翻译: The effect of extra doses at the pattern edges on negative electron resist profiles 是什么意思?
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参考翻译2: 额外剂量的影响在模式边缘负电子抵制概要文件 参考翻译3: No input file specified. 参考翻译4: 负电子的图案边缘上的额外剂量的效果抵制概况 参考翻译5: 额外的剂量在负电子抗蚀剂分布的图形边缘的影响
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