求翻译: Study of SiOxNy as a bottom antireflective coating and its pattern transferring capability 是什么意思?
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参考翻译2: 研究的SiO < sub > x < / sub > N < sub > y < / sub >作为底抗反射涂层及其模式转移能力 参考翻译3: Study of SiO&lt;sub&gt;x&lt;/sub&gt;N&lt;sub&gt;y&lt;/sub&gt; as a bottom antireflective coating and its pattern transferring capability 参考翻译5: 研究SiO x<<子> /子> n<子> y</子>作为底部抗反射涂层及其模式传输能力
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Study of SiOxNy as a bottom antireflective coating and its pattern transferring capability的翻译是:[翻译]
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Low energy N2 ion bombardment for removal of (HfO2)x(SiON)1-x in dilute HF的翻译是:低能源N<sub>2</sub> (HfO<sub>2</sub>) <sub>x</sub> (锡永)在稀释HF的<sub>1-x</sub>撤除的离子炮击[翻译]
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